Fwd: Problem tylanpoly SNF 2007-05-25 14:25:28: Re: oxygen levels in poly tube

maurice at stanford.edu maurice at stanford.edu
Fri May 25 14:28:29 PDT 2007




Arvind Kamath of Kovio reports:
" We recently ran SIMS on undoped poly (tylanpoly) and found 3% oxygen  
levels (This is ~ 10X compared to earlier results)."

At this time we don't  when the deposition was made.

We will run wafers on both poly tubes (they share a common gas line)  
and send them out to check the O2 level.

Once we have more information we with share it with you.



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