Tylanpoly up

Maurice Stevens maurice at stanford.edu
Fri Sep 5 17:34:22 PDT 2008


POLYEMIT  00:10:00
expecting ~1050
Actual:
c   1219
t    1237
b   1237
l   1232
r   1237

The deposition rate was higher than we expected.  If your thickness is 
critical, run a test before committing your real wafers.

-m



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