From maurice at stanford.edu  Mon Aug 10 11:29:03 2009
From: maurice at stanford.edu (Maurice Stevens)
Date: Mon, 10 Aug 2009 11:29:03 -0700
Subject: Share the ride/thick poly
Message-ID: <4A8066EF.6090104@stanford.edu>

If you are doing a poly run of over 1 um, please send an email out 
asking if anyone else want to add their wafers (less than 1 um deps 
could be shared also).

Over 15 um of poly was put on the tube in the last week just using the 
POLYEMIT recipe.  Some of the users ran the same thicknesses within 
hours of each other.

They could have shared the charges,  traded off getting pressure reading 
or shared the clean.

(And we could go a little longer before the system has to go down for a 
tube clean.)


-m




From kupnik at stanford.edu  Sun Aug 23 22:44:05 2009
From: kupnik at stanford.edu (Mario Kupnik)
Date: Sun, 23 Aug 2009 22:44:05 -0700
Subject: Fwd: Share the ride/thick poly
References: <4A8066EF.6090104@stanford.edu>
Message-ID: <D3F7934D-628B-4C68-9C79-8539244D0686@stanford.edu>

Hi tylanpoly users,

I plan to do several thick poly runs this week with the recipe POLYEMIT

You are welcome to share the ride and add your wafers into my runs:

Here is what I need to run:

Wed Aug 26 starting at 10 am for 1h 20 min (~ 1 um)
Wed Aug 26 starting at 5:30 pm for 2h 40 min (~ 2 um)
Thur Aug 27 starting at 2 pm for 2h 40 min (~ 2 um)
Fri Aug 28 starting at 10 am for 4 h 30 min (~ 3 um)
Sat Aug 29 starting at 10 am for 5 h 20 min (~ 4 um)


In total 12 um. Due to things I need to do in between, such as doping  
etc. I can not move around
the times much.


Mario






Begin forwarded message:

> From: Maurice Stevens <maurice at stanford.edu>
> Date: August 10, 2009 11:29:03 PDT
> To: tylanpoly at snf.stanford.edu
> Subject: Share the ride/thick poly
>
> If you are doing a poly run of over 1 um, please send an email out  
> asking if anyone else want to add their wafers (less than 1 um deps  
> could be shared also).
>
> Over 15 um of poly was put on the tube in the last week just using  
> the POLYEMIT recipe.  Some of the users ran the same thicknesses  
> within hours of each other.
>
> They could have shared the charges,  traded off getting pressure  
> reading or shared the clean.
>
> (And we could go a little longer before the system has to go down  
> for a tube clean.)
>
>
> -m
>
>

Mario Kupnik, Ph.D.

Research Associate
Ginzton Laboratory, room 49
Stanford University
Stanford, CA 94305-4088
Office: 650-725-4942
Fax: 650-725-3890
http://www-kyg.stanford.edu
E-mail: kupnik at stanford.edu









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