Burnbox input manifold at high pressure

maurice stevens maurice at stanford.edu
Fri Jun 26 16:34:18 PDT 2009


(sorry if you are getting this from multiple machines or if you are one 
of the 4 users with tylan LPCVD reservations for this weekend)

The following tubes will be down for the weekend:  tylanBPSG, tylanpoly, 
tylannitride, tylanSiGe and teos2.

The Tylan LPCVD burnbox input manifold (the Menorah) is at a positive 
pressure.  There is gas trapped between pumps and the burnbox.
We will let it purge over the weekend and safely clean it out we we are 
fully staffed on Monday morning.


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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