Long poly deposition

Kenney, Christopher J. kenney at slac.stanford.edu
Mon Mar 28 10:59:07 PDT 2011


Dear Lab Members,

We plan on performing a thick deposition of polysilicon later this week. The day depends
on when Thermocpoly1 is running as we need to do some doping prior to the
polysilicon run.

If anyone would like to piggyback on this thick poly deposition, please contact either Jasmine or me.

Thank you for your understanding,

Chris and Jasmine


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