Long poly deposition
maurice stevens
maurice at stanford.edu
Mon Mar 28 11:09:26 PDT 2011
perfect!
On 3/28/2011 10:59 AM, Kenney, Christopher J. wrote:
> Dear Lab Members,
>
> We plan on performing a thick deposition of polysilicon later this week. The day depends
> on when Thermocpoly1 is running as we need to do some doping prior to the
> polysilicon run.
>
> If anyone would like to piggyback on this thick poly deposition, please contact either Jasmine or me.
>
> Thank you for your understanding,
>
> Chris and Jasmine
--
maurice at stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278
More information about the tylanpoly
mailing list