Long poly deposition

maurice stevens maurice at stanford.edu
Mon Mar 28 11:09:26 PDT 2011


On 3/28/2011 10:59 AM, Kenney, Christopher J. wrote:
> Dear Lab Members,
> We plan on performing a thick deposition of polysilicon later this week. The day depends
> on when Thermocpoly1 is running as we need to do some doping prior to the
> polysilicon run.
> If anyone would like to piggyback on this thick poly deposition, please contact either Jasmine or me.
> Thank you for your understanding,
> Chris and Jasmine

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

More information about the tylanpoly mailing list