From amol at snf.stanford.edu  Wed Oct 18 09:09:20 2000
From: amol at snf.stanford.edu (amol at snf.stanford.edu)
Date: Oct 18, 2000 9:09:20 PM
Subject: Problem tylansige: H2 alarm continuously on.
Message-ID: <mailman.12.1356283826.5077.tylansige-pcs@snf.stanford.edu>

H2 alarm is continuous and new recipe cannot be loaded. Wafers still inside the furnace.



From seymour at snf.stanford.edu  Thu Oct 19 08:04:32 2000
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 19, 2000 8:04:32 AM
Subject: Problem Clear tylansige: H2 Alarm
Message-ID: <mailman.13.1356283826.5077.tylansige-pcs@snf.stanford.edu>

H2 MFC zero drifted. Reset zero and alarm.