From seymour at snf.stanford.edu  Fri Feb  2 09:28:46 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Feb 2, 2001 9:28:46 AM
Subject: Comment tylansige 2001-02-02 09:28:45: Silane cylinder change on Monday Feb 5
Message-ID: <mailman.24.1356283826.5077.tylansige-pcs@snf.stanford.edu>

system will be under pressure reduction test untill tuesday feb 6



From seymour at snf.stanford.edu  Mon Feb  5 06:14:25 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Feb 5, 2001 6:14:25 AM
Subject: Shutdown tylansige 2001-02-05 06:14:24: 
Message-ID: <mailman.25.1356283826.5077.tylansige-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue Feb  6 09:36:28 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Feb 6, 2001 9:36:28 AM
Subject: Shutdown tylansige 2001-02-05 06:14:24: Silane cylinder changed
Message-ID: <mailman.26.1356283826.5077.tylansige-pcs@snf.stanford.edu>




From amol at snf.stanford.edu  Thu Feb  8 08:12:04 2001
From: amol at snf.stanford.edu (amol at snf.stanford.edu)
Date: Feb 8, 2001 8:12:04 PM
Subject: Shutdown tylansige 2001-02-08 20:12:01: tube is cold!
Message-ID: <mailman.27.1356283826.5077.tylansige-pcs@snf.stanford.edu>

Temperature unknown, shows up as 250. Probably, heating for the tube is not on. Also TCU ERROR:80 found in the status.



From seymour at snf.stanford.edu  Mon Feb 12 08:15:34 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Feb 12, 2001 8:15:34 AM
Subject: Shutdown tylansige 2001-02-08 20:12:01: system is up
Message-ID: <mailman.28.1356283826.5077.tylansige-pcs@snf.stanford.edu>




From amol at snf.stanford.edu  Mon Feb 12 07:07:47 2001
From: amol at snf.stanford.edu (amol at snf.stanford.edu)
Date: Feb 12, 2001 7:07:47 PM
Subject: Shutdown tylansige 2001-02-12 19:07:46: Silane flow stopped
Message-ID: <mailman.29.1356283826.5077.tylansige-pcs@snf.stanford.edu>

Silane flow stopped suddenly 5 minutes after deposition started. SiH4 flow shows zero error. Wafers are in the furnace for later use.



From seymour at snf.stanford.edu  Tue Feb 13 08:21:07 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Feb 13, 2001 8:21:07 AM
Subject: Shutdown tylansige 2001-02-12 19:07:46: Silane flow stopped
Message-ID: <mailman.30.1356283826.5077.tylansige-pcs@snf.stanford.edu>

checked silane pressure and it was ok. Rezeroed MFC's and checked furnace operation and it was ok. Unable to flow silane for any length of time due to wafers left in the system.



From seymour at snf.stanford.edu  Wed Feb 14 07:50:02 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Feb 14, 2001 7:50:02 AM
Subject: Shutdown tylansige 2001-02-14 07:50:01: silane mfc faults
Message-ID: <mailman.31.1356283826.5077.tylansige-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue Feb 20 02:50:42 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Feb 20, 2001 2:50:42 PM
Subject: Shutdown tylansige 2001-02-14 07:50:01: Silane MFC has been replaced
Message-ID: <mailman.32.1356283826.5077.tylansige-pcs@snf.stanford.edu>