From chion at snf.stanford.edu Thu Jul 10 05:28:55 2003 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Jul 10, 2003 5:28:55 PM Subject: Problem tylansige 2003-07-10 17:28:54: Report Problem for tylansige Message-ID: After the power glitch, tube coating (Si dep) prog was run. Up to step 15, H2 leak alarm appeared. It happened twice. Pump program is being run now, waiting for manitence. From seymour at snf.stanford.edu Fri Jul 11 07:42:20 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 11, 2003 7:42:20 AM Subject: Problem tylansige 2003-07-10 17:28:54: Report Clear for tylansige Message-ID: H2 MFC zero was off. Adjusted zero and ran auto zero routine. put back into pump recipe. From ehkim at snf.stanford.edu Sun Jul 13 02:12:18 2003 From: ehkim at snf.stanford.edu (ehkim at snf.stanford.edu) Date: Jul 13, 2003 2:12:18 PM Subject: Problem tylansige 2003-07-13 14:12:15: SiH4 leak alarm Message-ID: SiH4 leak alarm when the tube was vented. SiH4 read was about 0.1-0.2. From ychliu at snf.stanford.edu Tue Jul 15 01:37:52 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Jul 15, 2003 1:37:52 PM Subject: Shutdown tylansige 2003-07-15 13:37:40: MSF error: 08 Message-ID: Process pressure kept showing to be zero at every step. It gave MSF error 8 at step 60. Recipe was aborted. My wafers are still inside. From seymour at snf.stanford.edu Tue Jul 15 03:00:16 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 15, 2003 3:00:16 PM Subject: Problem tylansige 2003-07-13 14:12:15: Report Clear for tylansige Message-ID: adjusted MFC zeros and ran MFS460 auto zero routine From seymour at snf.stanford.edu Tue Jul 15 03:01:06 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 15, 2003 3:01:06 PM Subject: Shutdown tylansige 2003-07-15 13:37:40: Report Clear for tylansige Message-ID: repaired faulty connection on pressure sensor. pumped tube to base pressure to verify reading. From gladys at snf.stanford.edu Tue Jul 29 03:32:21 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jul 29, 2003 3:32:21 PM Subject: Shutdown tylansige 2003-07-29 15:32:20: Report Shutdown for tylansige Message-ID: burnbox is down From seymour at snf.stanford.edu Tue Jul 29 03:56:36 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 29, 2003 3:56:36 PM Subject: Shutdown tylansige 2003-07-29 15:32:20: Report Clear for tylansige Message-ID: replaced breaker with fuse, burn box up to temp From gladys at snf.stanford.edu Tue Jul 29 04:15:32 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jul 29, 2003 4:15:32 PM Subject: Shutdown tylansige 2003-07-29 16:15:32: Report Shutdown for tylansige Message-ID: burnbox is down From maurice at snf.stanford.edu Tue Jul 29 04:59:35 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 29, 2003 4:59:35 PM Subject: Shutdown tylansige 2003-07-29 16:15:32: Report Clear for tylansige Message-ID: clear