Problem tylansige 2003-07-10 17:28:54: Report Problem for tylansige

chion at snf.stanford.edu chion at snf.stanford.edu
Thu Jul 10 05:28:55 PDT 2003


After the power glitch, tube coating (Si dep) prog was run.
Up to step 15, H2 leak alarm appeared. It happened twice.
Pump program is being run now, waiting for manitence.




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