Shutdown tylansige 2003-07-15 13:37:40: MSF error: 08

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Tue Jul 15 01:37:52 PDT 2003


Process pressure kept showing to be zero at every step. It gave MSF error 8 at step 60. Recipe was aborted. My wafers are still inside.




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