From ychliu at snf.stanford.edu  Wed Nov  5 16:50:53 2003
From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu)
Date: Wed, 5 Nov 2003 16:50:53 -0800
Subject: Problem tylansige 2003-11-05 16:50:53: N2 BKFL Leak
Message-ID: <mailman.154.1356283827.5077.tylansige-pcs@snf.stanford.edu>

It happened at the last step of a run (both for a deposition recipe and for coat8 recipe). 



From seymour at snf.stanford.edu  Thu Nov  6 07:43:24 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 6 Nov 2003 07:43:24 -0800
Subject: Problem tylansige 2003-11-05 16:50:53: N2 BKFL Leak
Message-ID: <mailman.155.1356283827.5077.tylansige-pcs@snf.stanford.edu>

found N2Backfill reading at 50 sccm with zero flow setpoint. Checked and adjusted monoblock  mfc zero's. Did the auto zero routine. Loaded and started sigepump.