Problem tylansige SNF 2004-08-19 16:59:23: MFS Alarm on Silane

pethe at snf.stanford.edu pethe at snf.stanford.edu
Thu Aug 19 16:59:24 PDT 2004


MFS alarm on SiH4 was observed frequently during the run. The Silane flow was checked everytime this happened, and the flow rate jumped between 0.2sccm and 0. Once the SiH4 flow went to zero, the MFS ALrm was acknowledged and the process was continued. MFS alarm also occured when i loaded COAT8 on the tube after my deposition was done. The process was not started yet the tube reported a Silane leak.




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