Problem tylansige 2004-02-28 11:45:01: Very bad deposition

ychliu at ychliu at
Sat Feb 28 11:45:02 PST 2004

I did another test run of Ge deposition. The results came out very bad. There are many particles (hillocks). Some large size (more than 10micron) clusters were also found in the deposited films.

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