From seymour at snf.stanford.edu Fri Jul 9 13:20:01 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Jul 2004 13:20:01 -0700 Subject: Problem tylansige SNF 2004-07-09 13:20:00: leak check fails in recipe dpoly var. Message-ID: putting the controller in HOLD untill the tube pressure is below 500 mTorr should eliminate this jump to step 110 and ending the recipe. From seymour at snf.stanford.edu Fri Jul 9 14:55:35 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Jul 2004 14:55:35 -0700 Subject: Problem tylansige SNF 2004-07-09 13:20:00: leak check fails in recipe dpoly var. Message-ID: This problem was mistakenly entered for the sige tube. From mdickey at snf.stanford.edu Thu Jul 15 06:28:01 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jul 2004 06:28:01 -0700 Subject: Shutdown tylansige SNF 2004-07-15 06:28:00: Bottle change Message-ID: Germane bottle needs to be changed From mdickey at snf.stanford.edu Fri Jul 16 13:36:39 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 16 Jul 2004 13:36:39 -0700 Subject: Shutdown tylansige SNF 2004-07-15 06:28:00: Bottle change Message-ID: Germane bottle back on line. From rohits at snf.stanford.edu Wed Jul 21 17:48:27 2004 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Wed, 21 Jul 2004 17:48:27 -0700 Subject: Comment tylansige SNF 2004-07-21 17:48:26: temperature and pressure stabilization problem Message-ID: The temperature does not stabilize at 500C even after waiting for 1 hour. There is about 5C variation from the front to the back of the tube. There is also a temporal variation in each zone. For the center zone, it fluctuates from 497-501.5 with a period of about 5 min. Also, the bleed valve (nupro?) for manual control of N2 backflow doesn't seem to be able to turn off N2 backflow completely even when turned fully clockwise. There is still 128sccm of flow. This results in a minimum pressure of 168mtorr while flowing 76sccm SiH4 and 16sccm GeH4. In the past, this used to yield the target pressure of 100mTorr with these gas flows. -- Rohit From rohits at snf.stanford.edu Wed Jul 21 18:59:44 2004 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Wed, 21 Jul 2004 18:59:44 -0700 Subject: Problem tylansige SNF 2004-07-21 18:59:40: mfs alarm during final tube vent Message-ID: After running the deposition, there was a mfs alarm during the final step (close gate valve and vent). The reason for the mfs alarm was 'SIH4.LEAK" - it showed 0.1-0.2sccm of SiH4. I aborted the recipe and run the Sigepump program for a little while before unloading my wafers. We have seen this problem on a number of occasions before. -- Rohit