Problem tylansige SNF 2004-07-09 13:20:00: leak check fails in recipe dpoly var.

seymour at snf.stanford.edu seymour at snf.stanford.edu
Fri Jul 9 13:20:01 PDT 2004


putting the controller in HOLD untill the tube pressure is below 500 mTorr should eliminate this jump to step 110 and ending the recipe.




More information about the tylansige-pcs mailing list