Problem tylansige SNF 2004-07-21 18:59:40: mfs alarm during final tube vent

rohits at rohits at
Wed Jul 21 18:59:44 PDT 2004

After running the deposition, there was a mfs alarm during the final step (close gate valve and vent). The reason for the mfs alarm was 'SIH4.LEAK" - it showed 0.1-0.2sccm of SiH4. I aborted the recipe and run the Sigepump program for a little while before unloading my wafers. We have seen this problem on a number of occasions before. 

More information about the tylansige-pcs mailing list