From seymour at snf.stanford.edu  Fri Oct  8 07:58:13 2004
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 8 Oct 2004 07:58:13 -0700
Subject: Problem tylansige SNF 2004-09-28 11:28:53: MFS Alarm during Wafer Load
Message-ID: <mailman.209.1356283827.5077.tylansige-pcs@snf.stanford.edu>

noted



From seymour at snf.stanford.edu  Fri Oct  8 08:00:57 2004
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 8 Oct 2004 08:00:57 -0700
Subject: Problem tylansige SNF 2004-09-28 16:41:14: MFS Alarm- SiH4 Leak
Message-ID: <mailman.210.1356283827.5077.tylansige-pcs@snf.stanford.edu>

The silane MFC zero drifts and causes alarm. There is not a leak in the silane line