From seymour at snf.stanford.edu Wed Sep 1 15:11:22 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Sep 2004 15:11:22 -0700 Subject: Problem tylansige SNF 2004-08-19 17:21:11: Showing MFS error 08 Message-ID: tube has been silent for days now From pethe at snf.stanford.edu Tue Sep 28 11:28:53 2004 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Tue, 28 Sep 2004 11:28:53 -0700 Subject: Problem tylansige SNF 2004-09-28 11:28:53: MFS Alarm during Wafer Load Message-ID: The MFS Alarm went off with a "SiH4 Leak" during the loading of the wafers. The Silane flow was checked and was noted to be at 0. The MFS alarm was cleared and the process was resumed. From pethe at snf.stanford.edu Tue Sep 28 16:41:15 2004 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Tue, 28 Sep 2004 16:41:15 -0700 Subject: Problem tylansige SNF 2004-09-28 16:41:14: MFS Alarm- SiH4 Leak Message-ID: MFS Alarm- SiH4 Leak ioccured during loading of the recipe COAT8 second time after a Ge deposition run. The SiH4 flow read 0.2sccm. The program was aborted and SIGEPUMP was loaded and run for 15minutes after the SiH4 flow fell to 0 to ensure that all SiH4 has been pumped out.