Problem tylansige SNF 2004-09-28 11:28:53: MFS Alarm during Wafer Load

pethe at snf.stanford.edu pethe at snf.stanford.edu
Tue Sep 28 11:28:53 PDT 2004


The MFS Alarm went off with a "SiH4 Leak" during the loading of the wafers. The Silane flow was checked and was noted to be at 0. The MFS alarm was cleared and the process was resumed.




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