Problem tylansige SNF 2004-09-28 16:41:14: MFS Alarm- SiH4 Leak

pethe at snf.stanford.edu pethe at snf.stanford.edu
Tue Sep 28 16:41:15 PDT 2004


MFS Alarm- SiH4 Leak ioccured during loading of the recipe COAT8 second time after a Ge deposition run. The SiH4 flow read 0.2sccm. The program was aborted and SIGEPUMP was loaded and run for 15minutes after the SiH4 flow fell to 0 to ensure that all SiH4  has been pumped out.




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