From aokyay at snf.stanford.edu  Thu Dec  1 04:48:23 2005
From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu)
Date: Thu, 1 Dec 2005 04:48:23 -0800
Subject: Problem tylansige SNF 2005-12-01 04:48:22: Silane leak
Message-ID: <mailman.301.1356283828.5077.tylansige-pcs@snf.stanford.edu>

MFS alarm Silane Leak. The reading is <=0.2sccm. Used to give this error when the MFC reading drifted. 



From aokyay at snf.stanford.edu  Sat Dec  3 05:44:42 2005
From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu)
Date: Sat, 3 Dec 2005 05:44:42 -0800
Subject: Problem tylansige SNF 2005-12-03 05:44:41: silane leak alarm
Message-ID: <mailman.302.1356283828.5077.tylansige-pcs@snf.stanford.edu>

silane alarms at vent steps, very similar to earlier problem. i check the reading and most of the time it reads 0.0 (sometimes 0.1 or 0.2 as well)



From bipin at snf.stanford.edu  Tue Dec  6 16:08:48 2005
From: bipin at snf.stanford.edu (bipin at snf.stanford.edu)
Date: Tue, 6 Dec 2005 16:08:48 -0800
Subject: Problem tylansige SNF 2005-12-06 16:08:46: Silane leak alarm
Message-ID: <mailman.303.1356283828.5077.tylansige-pcs@snf.stanford.edu>

The reading of SiH4 flow rate is between 0.2 & 0.4



From jrjain at snf.stanford.edu  Mon Dec 12 17:48:29 2005
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Mon, 12 Dec 2005 17:48:29 -0800
Subject: Problem tylansige SNF 2005-12-12 17:48:28: Failed to vent
Message-ID: <mailman.304.1356283828.5077.tylansige-pcs@snf.stanford.edu>

Tube failed to vent and pull manually after 45min of waiting.



From tberg at snf.stanford.edu  Tue Dec 13 06:40:51 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 13 Dec 2005 06:40:51 -0800
Subject: Comment tylansige SNF 2005-11-22 23:45:02: Please do NOT put the logbook on the hood
Message-ID: <mailman.305.1356283828.5077.tylansige-pcs@snf.stanford.edu>

noted



From mdickey at snf.stanford.edu  Tue Dec 13 07:11:21 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 13 Dec 2005 07:11:21 -0800
Subject: Problem tylansige SNF 2005-12-12 17:48:28: Failed to vent
Message-ID: <mailman.306.1356283828.5077.tylansige-pcs@snf.stanford.edu>

Adjusted the zero, vents now



From tberg at snf.stanford.edu  Thu Dec 15 14:00:43 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 15 Dec 2005 14:00:43 -0800
Subject: Problem tylansige SNF 2005-12-01 04:48:22: Silane leak
Message-ID: <mailman.307.1356283828.5077.tylansige-pcs@snf.stanford.edu>

noted



From tberg at snf.stanford.edu  Thu Dec 15 14:00:56 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 15 Dec 2005 14:00:56 -0800
Subject: Problem tylansige SNF 2005-12-03 05:44:41: silane leak alarm
Message-ID: <mailman.308.1356283828.5077.tylansige-pcs@snf.stanford.edu>

noted