From tberg at snf.stanford.edu Tue Feb 1 06:54:36 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2005 06:54:36 -0800 Subject: Shutdown tylansige SNF 2005-01-31 22:23:24: Silane Leak Message-ID: THis is not a silane leak but a drift in the MFC zero the N2/argon is still flowing and the tube will vent. looking into zero drift From aokyay at snf.stanford.edu Wed Feb 2 18:04:14 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Wed, 2 Feb 2005 18:04:14 -0800 Subject: Comment tylansige SNF 2005-02-02 18:04:14: silane leak error during ventig Message-ID: From khansolo at snf.stanford.edu Sat Feb 5 03:00:39 2005 From: khansolo at snf.stanford.edu (khansolo at snf.stanford.edu) Date: Sat, 5 Feb 2005 03:00:39 -0800 Subject: Shutdown tylansige SNF 2005-02-05 03:00:39: PUMPDOWN FAILED Message-ID: Coat 8 didn't go through because of PUMPDOWN FAIL. SIGEPUMP failed as well. Keep having SILANE LEAK ERROR. From tberg at snf.stanford.edu Tue Feb 8 08:26:54 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Feb 2005 08:26:54 -0800 Subject: Comment tylansige SNF 2005-02-02 18:04:14: silane leak error during ventig Message-ID: MFC replaced From tberg at snf.stanford.edu Tue Feb 8 08:27:12 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Feb 2005 08:27:12 -0800 Subject: Problem tylansige SNF 2005-01-30 00:07:05: Silane Leak Message-ID: MFC replaced From tberg at snf.stanford.edu Tue Feb 8 08:28:13 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Feb 2005 08:28:13 -0800 Subject: Comment tylansige SNF 2005-02-08 08:28:13: Leak Message-ID: Sheaths cracked, replaced tube sheaths and SiH4 MFC From tberg at snf.stanford.edu Tue Feb 8 08:31:18 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Feb 2005 08:31:18 -0800 Subject: Comment tylansige SNF 2005-02-08 08:31:17: Needs test-coat completed Message-ID: From maurice at snf.stanford.edu Wed Feb 9 10:01:09 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2005 10:01:09 -0800 Subject: Comment tylansige SNF 2005-02-08 08:31:17: Needs test-coat completed Message-ID: test being run by user aokyay From maurice at snf.stanford.edu Wed Feb 9 10:01:42 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2005 10:01:42 -0800 Subject: Comment tylansige SNF 2005-02-08 08:28:13: Leak Message-ID: replaced cracked sheith From maurice at snf.stanford.edu Wed Feb 9 10:02:18 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2005 10:02:18 -0800 Subject: Shutdown tylansige SNF 2005-02-05 03:00:39: PUMPDOWN FAILED Message-ID: cracked sheith From maurice at snf.stanford.edu Wed Feb 9 10:02:35 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2005 10:02:35 -0800 Subject: Problem tylansige SNF 2005-02-09 10:02:35: user running test Message-ID: From aokyay at snf.stanford.edu Wed Feb 9 23:22:06 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Wed, 9 Feb 2005 23:22:06 -0800 Subject: Shutdown tylansige SNF 2005-02-09 23:22:06: Silane flow problem Message-ID: SIH4 FTNLK error and no silane flow reading (at step 65 receipe CHION). Ran the receipe twice, but same error. Please move the boats slightly towards the source end of the tube. Thanks! From tberg at snf.stanford.edu Thu Feb 17 13:11:40 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Feb 2005 13:11:40 -0800 Subject: Shutdown tylansige SNF 2005-02-09 23:22:06: Silane flow problem Message-ID: Replaced valve manifold ran CHION recipe needs test From aokyay at snf.stanford.edu Thu Feb 17 19:51:49 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Thu, 17 Feb 2005 19:51:49 -0800 Subject: Comment tylansige SNF 2005-02-17 19:51:48: N2BKFL error at step 140 Message-ID: From aokyay at snf.stanford.edu Fri Feb 18 15:08:12 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Fri, 18 Feb 2005 15:08:12 -0800 Subject: Shutdown tylansige SNF 2005-02-18 15:08:12: Bottle change Message-ID: From aokyay at snf.stanford.edu Fri Feb 18 15:08:36 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Fri, 18 Feb 2005 15:08:36 -0800 Subject: Comment tylansige SNF 2005-02-18 15:08:36: Load side temp stabilization problem Message-ID: From seymour at snf.stanford.edu Fri Feb 18 16:06:51 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 Feb 2005 16:06:51 -0800 Subject: Comment tylansige SNF 2005-02-18 16:06:50: Germane changed Message-ID: on leak check From mdickey at snf.stanford.edu Wed Feb 23 07:01:18 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Feb 2005 07:01:18 -0800 Subject: Comment tylansige SNF 2005-02-18 16:06:50: Germane changed Message-ID: Germane is back on line From mdickey at snf.stanford.edu Wed Feb 23 07:01:41 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Feb 2005 07:01:41 -0800 Subject: Comment tylansige SNF 2005-02-23 07:01:40: Test Message-ID: System needs test after a bottle change From mdickey at snf.stanford.edu Wed Feb 23 07:02:03 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Feb 2005 07:02:03 -0800 Subject: Shutdown tylansige SNF 2005-02-18 15:08:12: Bottle change Message-ID: Bottle change done From aokyay at snf.stanford.edu Thu Feb 24 11:34:35 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Thu, 24 Feb 2005 11:34:35 -0800 Subject: Problem tylansige SNF 2005-02-24 11:34:34: load side temp problem Message-ID: After overnight (~12hours) stabilization period, the load side temperature reading is still 10C lower than the setpoint. Center and source are ok! THANKS From aokyay at snf.stanford.edu Thu Feb 24 21:37:41 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Thu, 24 Feb 2005 21:37:41 -0800 Subject: Comment tylansige SNF 2005-02-24 21:37:41: run ok Message-ID: test wafer looks ok