Shutdown tylansige SNF 2005-02-09 23:22:06: Silane flow problem

aokyay at snf.stanford.edu aokyay at snf.stanford.edu
Wed Feb 9 23:22:06 PST 2005


SIH4 FTNLK error and no silane flow reading (at step 65 receipe CHION). Ran the receipe twice, but same error. 
Please move the boats slightly towards the source end of the tube. Thanks!




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