From khansolo at snf.stanford.edu Fri Jan 21 12:08:00 2005 From: khansolo at snf.stanford.edu (khansolo at snf.stanford.edu) Date: Fri, 21 Jan 2005 12:08:00 -0800 Subject: Problem tylansige SNF 2005-01-21 12:07:59: SIH4.FNTLK error Message-ID: At Pre-silane step, (recipe CHION) There was no SiH4 flow and a "SiH4. FNTLK" error was popped up. I aborted the recipe and loaded "SIGEPUMP". Pressure guage shows that SiH4 bottle is not empty. My wafers are still in the tube. I will try to run "CHION" again and report the result again. From khansolo at snf.stanford.edu Fri Jan 21 14:49:47 2005 From: khansolo at snf.stanford.edu (khansolo at snf.stanford.edu) Date: Fri, 21 Jan 2005 14:49:47 -0800 Subject: Problem tylansige SNF 2005-01-21 14:49:46: PPC P ?? Error ( I couldn't read correctly) Message-ID: After no SiH4 flow error, I tried to run the recipe, "CHION" again. It went fine until step 55. When it just proceeded to step 60, 'PRE-SILANE" step, it gave "PPC P??" error ( p valve LED on the panel in the backside box was blinking ) and then it proceeded to step 100 (1st PUMPDOWN) directly. From khansolo at snf.stanford.edu Fri Jan 21 15:42:25 2005 From: khansolo at snf.stanford.edu (khansolo at snf.stanford.edu) Date: Fri, 21 Jan 2005 15:42:25 -0800 Subject: Problem tylansige SNF 2005-01-21 15:42:24: No SiH4 Flow again. Message-ID: I tried for the last time and encountered the same error- No SiH4 flow and the message, SIH4. FNTLK. I am running SIGEPUMP right now and will take my wafers out. From tberg at snf.stanford.edu Tue Jan 25 11:08:57 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Jan 2005 11:08:57 -0800 Subject: Shutdown tylansige SNF 2005-01-25 11:08:56: No SiH4 Flow in Auto Message-ID: From tberg at snf.stanford.edu Thu Jan 27 13:07:37 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 27 Jan 2005 13:07:37 -0800 Subject: Problem tylansige SNF 2005-01-21 12:07:59: SIH4.FNTLK error Message-ID: Replaced mfs460 Power supply,SiH4 solenoid, Ran Chion From tberg at snf.stanford.edu Thu Jan 27 13:08:08 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 27 Jan 2005 13:08:08 -0800 Subject: Problem tylansige SNF 2005-01-21 14:49:46: PPC P ?? Error ( I couldn't read correctly) Message-ID: From tberg at snf.stanford.edu Thu Jan 27 13:08:36 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 27 Jan 2005 13:08:36 -0800 Subject: Problem tylansige SNF 2005-01-21 15:42:24: No SiH4 Flow again. Message-ID: Replaced Power supply, SiH4 solenoid From tberg at snf.stanford.edu Thu Jan 27 13:10:00 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 27 Jan 2005 13:10:00 -0800 Subject: Shutdown tylansige SNF 2005-01-25 11:08:56: No SiH4 Flow in Auto Message-ID: Replaced Mfs 460 Power supply and SiH4 solenoid From khansolo at snf.stanford.edu Sun Jan 30 00:07:05 2005 From: khansolo at snf.stanford.edu (khansolo at snf.stanford.edu) Date: Sun, 30 Jan 2005 00:07:05 -0800 Subject: Problem tylansige SNF 2005-01-30 00:07:05: Silane Leak Message-ID: Initially Coat 8 was running. I aborted the recipe to start venting and after few minutes tube gave Silane Leak Error. I loaded SIGEPUMP recipe to pump down the tube. After Silane Leak Error was cleared I tried to vent the tube twice more but it kept giving Silane Error. I left the tube with SIGEPUMP running. From khansolo at snf.stanford.edu Mon Jan 31 22:23:24 2005 From: khansolo at snf.stanford.edu (khansolo at snf.stanford.edu) Date: Mon, 31 Jan 2005 22:23:24 -0800 Subject: Shutdown tylansige SNF 2005-01-31 22:23:24: Silane Leak Message-ID: Silane Leak. Cannot vent the tube because of Silane Leak.