Problem tylansige SNF 2005-01-21 12:07:59: SIH4.FNTLK error

khansolo at snf.stanford.edu khansolo at snf.stanford.edu
Fri Jan 21 12:08:00 PST 2005


At Pre-silane step, (recipe CHION) There was no SiH4 flow and a "SiH4. FNTLK" error was popped up. I aborted the recipe and loaded "SIGEPUMP". Pressure guage shows that SiH4 bottle is not empty. My wafers are still in the tube. I will try to run "CHION" again and report the result again.




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