Problem tylansige SNF 2005-01-21 14:49:46: PPC P ?? Error ( I couldn't read correctly)

khansolo at snf.stanford.edu khansolo at snf.stanford.edu
Fri Jan 21 14:49:47 PST 2005


After no SiH4 flow error, I tried to run the recipe, "CHION" again. It went fine until step 55. When it just proceeded to step 60, 'PRE-SILANE" step, it gave "PPC P??" error ( p valve LED on the panel in the backside box was blinking ) and then it proceeded to step 100 (1st PUMPDOWN) directly.  




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