Problem tylansige SNF 2005-01-21 15:42:24: No SiH4 Flow again.

khansolo at snf.stanford.edu khansolo at snf.stanford.edu
Fri Jan 21 15:42:25 PST 2005


I tried for the last time and encountered the same error- No SiH4 flow and the message, SIH4. FNTLK. I am running SIGEPUMP right now and will take my wafers out. 




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