Problem tylansige SNF 2005-01-30 00:07:05: Silane Leak

[khansolo at snf.stanford.edu]

Initially Coat 8 was running. I aborted the recipe to start venting and after few minutes tube gave Silane Leak Error. I loaded SIGEPUMP recipe to pump down the tube. After Silane Leak Error was cleared I tried to vent the tube twice more but it kept giving Silane Error. I left the tube with SIGEPUMP running.