Problem tylansige SNF 2005-01-30 00:07:05: Silane Leak

khansolo at snf.stanford.edu khansolo at snf.stanford.edu
Sun Jan 30 00:07:05 PST 2005


Initially Coat 8 was running. I aborted the recipe to start venting and after few minutes tube gave Silane Leak Error. I loaded SIGEPUMP recipe to pump down the tube. After Silane Leak Error was cleared I tried to vent the tube twice more but it kept giving Silane Error. I left the tube with SIGEPUMP running. 




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