From aokyay at snf.stanford.edu Sat Jun 18 10:22:00 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 18 Jun 2005 10:22:00 -0700 Subject: Problem tylansige SNF 2005-06-18 10:21:59: TCU I/O error Message-ID: Gives TCU I/O ERROR warning when a receipe is run. Reports a TCU ERROR:80 on the status screen From aokyay at snf.stanford.edu Sat Jun 18 10:31:50 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 18 Jun 2005 10:31:50 -0700 Subject: Shutdown tylansige SNF 2005-06-18 10:31:50: no temperature reading Message-ID: No reading of any thermocouple temp, neither on tycom nor at the tube console. Related error persists: TCU I/O Error... Possibly due to power outage on Friday? From mdickey at snf.stanford.edu Mon Jun 20 08:03:50 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 20 Jun 2005 08:03:50 -0700 Subject: Shutdown tylansige SNF 2005-06-18 10:31:50: no temperature reading Message-ID: Reset the TCU...back up to temp From mdickey at snf.stanford.edu Mon Jun 20 08:04:03 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 20 Jun 2005 08:04:03 -0700 Subject: Problem tylansige SNF 2005-06-18 10:21:59: TCU I/O error Message-ID: Reset TCU From seymour at snf.stanford.edu Wed Jun 22 13:21:28 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 22 Jun 2005 13:21:28 -0700 Subject: Comment tylansige SNF 2005-03-24 20:38:09: mfs alarm at vent step (sih4 leak) Message-ID: noted From aokyay at snf.stanford.edu Sat Jun 25 11:16:54 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 25 Jun 2005 11:16:54 -0700 Subject: Comment tylansige SNF 2005-06-25 11:16:54: SiH4 FNTLK error Message-ID: At the deposition step of the coat program. Silane flow goes to zero, MFS alarm = SiH4 FNTLK Condition normal after clearing the alarm. Cleared more than once during coat program. Please make sure to stick around during COAT8 to clear any such alarms... Thanks