Comment tylansige SNF 2005-06-25 11:16:54: SiH4 FNTLK error

aokyay at snf.stanford.edu aokyay at snf.stanford.edu
Sat Jun 25 11:16:54 PDT 2005


At the deposition step of the coat program. Silane flow goes to zero, MFS alarm = SiH4 FNTLK
Condition normal after clearing the alarm. Cleared more than once during coat program.
Please make sure to stick around during COAT8 to clear any such alarms...
Thanks




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