Problem tylansige SNF 2005-05-14 23:24:16: N2/Ar2 Leak Error

khansolo at snf.stanford.edu khansolo at snf.stanford.edu
Sat May 14 23:24:17 PDT 2005


N2/Ar2 Leak error at Ge deposition step. The valve was closed but the sensor showed leakage by '20'.




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