From aokyay at snf.stanford.edu Sat Oct 1 16:02:30 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 1 Oct 2005 16:02:30 -0700 Subject: Problem tylansige SNF 2005-10-01 16:02:29: serious issue Message-ID: i just wanted to point to a serous problem that i have come across for a number of times now. seems like someone either by mistake vents the tube and SiGe tube stays at atm pressure until next user realizes this. Since the tube is used relatively less frequently, this means it is left vented possible for days at a time. An LPCVD tube has to be kept at low pressure. I want to see if there is any suggested actions as to avoid this in the future. From aokyay at snf.stanford.edu Sat Oct 1 16:33:33 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 1 Oct 2005 16:33:33 -0700 Subject: Problem tylansige SNF 2005-10-01 16:33:31: boat won't come out Message-ID: although the tube seemed to be vented for a very long time, itwould not come when i tried to manually bring it out before running the process. ran sigepump for few minutes and revented the tube. will try manually again... From aokyay at snf.stanford.edu Sat Oct 1 16:52:05 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 1 Oct 2005 16:52:05 -0700 Subject: Shutdown tylansige SNF 2005-10-01 16:52:05: boat will not come out Message-ID: appears that it is not venting even after over 40min. pressure reading is normal (2000) but the boat will not come out manually. From tberg at snf.stanford.edu Mon Oct 3 06:22:44 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:22:44 -0700 Subject: Comment tylansige SNF 2005-09-13 14:36:33: Pls check the GeH4 cylinder before long dep Message-ID: Looks OK From tberg at snf.stanford.edu Mon Oct 3 06:23:17 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:23:17 -0700 Subject: Problem tylansige SNF 2005-10-01 16:33:31: boat won't come out Message-ID: Noted From tberg at snf.stanford.edu Mon Oct 3 06:23:30 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:23:30 -0700 Subject: Comment tylansige SNF 2005-09-29 18:17:52: ran coat8 Message-ID: Noted From tberg at snf.stanford.edu Mon Oct 3 06:23:45 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:23:45 -0700 Subject: Comment tylansige SNF 2005-09-16 06:15:01: SiH4 MFC replaced needs test Message-ID: Cleared From tberg at snf.stanford.edu Mon Oct 3 06:23:56 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:23:56 -0700 Subject: Problem tylansige SNF 2005-09-13 13:38:28: SiH4 flow is too High Message-ID: Cleared From tberg at snf.stanford.edu Mon Oct 3 06:24:10 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:24:10 -0700 Subject: Problem tylansige SNF 2005-09-28 16:47:30: Could not achieve Process Pressure Message-ID: Ran OK From mdickey at snf.stanford.edu Mon Oct 3 06:44:45 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:44:45 -0700 Subject: Shutdown tylansige SNF 2005-10-01 16:52:05: boat will not come out Message-ID: Adjusted door boat out switch. Works now From mdickey at snf.stanford.edu Mon Oct 3 14:42:03 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 3 Oct 2005 14:42:03 -0700 Subject: Problem tylansige SNF 2005-10-01 16:02:29: serious issue Message-ID: noted From aokyay at snf.stanford.edu Mon Oct 3 18:33:36 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Mon, 3 Oct 2005 18:33:36 -0700 Subject: Comment tylansige SNF 2005-10-03 18:33:35: test run ok Message-ID: MFS alarm during ventig step: N2BFK cleared it From aokyay at snf.stanford.edu Fri Oct 7 20:45:40 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Fri, 7 Oct 2005 20:45:40 -0700 Subject: Problem tylansige SNF 2005-10-07 20:45:39: MFS error Message-ID: N2BFK FALT error at the last (venting) step; smooth run otherwise! From mdickey at snf.stanford.edu Mon Oct 10 06:40:41 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Oct 2005 06:40:41 -0700 Subject: Shutdown tylansige SNF 2005-10-10 06:40:41: Germane Message-ID: Down for Germane bottle change From tberg at snf.stanford.edu Mon Oct 10 14:48:04 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Oct 2005 14:48:04 -0700 Subject: Comment tylansige SNF 2005-10-03 18:33:35: test run ok Message-ID: noted From mdickey at snf.stanford.edu Tue Oct 11 06:40:56 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 11 Oct 2005 06:40:56 -0700 Subject: Shutdown tylansige SNF 2005-10-10 06:40:41: Germane Message-ID: Germane is back on line