Problem tylansige SNF 2005-10-01 16:02:29: serious issue

aokyay at snf.stanford.edu aokyay at snf.stanford.edu
Sat Oct 1 16:02:30 PDT 2005


i just wanted to point to a serous problem that i have come across for a number of times now. seems like someone either by mistake vents the tube and SiGe tube stays at atm pressure until next user realizes this. Since the tube is used relatively less frequently, this means it is left vented possible for days at a time. An LPCVD tube has to be kept at low pressure. I want to see if there is any suggested actions as to avoid this in the future.




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