From tberg at snf.stanford.edu  Tue Sep 13 13:38:33 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 13 Sep 2005 13:38:33 -0700
Subject: Problem tylansige SNF 2005-09-13 13:38:28: SiH4 flow is too High
Message-ID: <mailman.271.1356283828.5077.tylansige-pcs@snf.stanford.edu>




From pethe at snf.stanford.edu  Tue Sep 13 14:36:34 2005
From: pethe at snf.stanford.edu (pethe at snf.stanford.edu)
Date: Tue, 13 Sep 2005 14:36:34 -0700
Subject: Comment tylansige SNF 2005-09-13 14:36:33: Pls check the GeH4 cylinder before long dep
Message-ID: <mailman.272.1356283828.5077.tylansige-pcs@snf.stanford.edu>

The GeH4 bottle is low on gas. Please check with maintenace staff if you plan to do long Ge deps.



From tberg at snf.stanford.edu  Fri Sep 16 06:15:02 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 16 Sep 2005 06:15:02 -0700
Subject: Comment tylansige SNF 2005-09-16 06:15:01: SiH4 MFC replaced needs test
Message-ID: <mailman.273.1356283828.5077.tylansige-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Sep 20 16:15:41 2005
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 20 Sep 2005 16:15:41 -0700
Subject: Shutdown tylansige SNF 2005-09-20 16:15:38: pump off
Message-ID: <mailman.274.1356283828.5077.tylansige-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Sep 20 16:31:48 2005
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 20 Sep 2005 16:31:48 -0700
Subject: Shutdown tylansige SNF 2005-09-20 16:15:38: pump off
Message-ID: <mailman.275.1356283828.5077.tylansige-pcs@snf.stanford.edu>

pump turned on after power glitch



From pethe at snf.stanford.edu  Wed Sep 28 16:47:31 2005
From: pethe at snf.stanford.edu (pethe at snf.stanford.edu)
Date: Wed, 28 Sep 2005 16:47:31 -0700
Subject: Problem tylansige SNF 2005-09-28 16:47:30: Could not achieve Process Pressure
Message-ID: <mailman.276.1356283828.5077.tylansige-pcs@snf.stanford.edu>

We had a problem achieving Process Pressure on teh tube in standard processes ROHITS and COAT8. Both of them gave a PPC fault during the stabilization which continued through deposition.



From aokyay at snf.stanford.edu  Thu Sep 29 18:17:52 2005
From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu)
Date: Thu, 29 Sep 2005 18:17:52 -0700
Subject: Comment tylansige SNF 2005-09-29 18:17:52: ran coat8
Message-ID: <mailman.277.1356283828.5077.tylansige-pcs@snf.stanford.edu>

press error at 50 (stabilization)
deposition step with no problem
will run a test!
ali