Problem tylansige SNF 2005-09-28 16:47:30: Could not achieve Process Pressure

pethe at snf.stanford.edu pethe at snf.stanford.edu
Wed Sep 28 16:47:31 PDT 2005


We had a problem achieving Process Pressure on teh tube in standard processes ROHITS and COAT8. Both of them gave a PPC fault during the stabilization which continued through deposition.




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