Shutdown tylansige SNF 2006-07-17 13:04:21: cannot reach base pressure

aokyay at snf.stanford.edu aokyay at snf.stanford.edu
Mon Jul 17 13:04:29 PDT 2006


Fails the pump down step and aborts. Tried a few times, but no luck. 
Also gives SiH4 leak alarm. MFC reading ~0.2sccm




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