From pethe at snf.stanford.edu  Sun May 14 19:05:20 2006
From: pethe at snf.stanford.edu (pethe at snf.stanford.edu)
Date: Sun, 14 May 2006 19:05:20 -0700
Subject: Shutdown tylansige SNF 2006-05-14 19:05:18: No Silane flow
Message-ID: <mailman.330.1356283828.5077.tylansige-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Mon May 15 06:25:09 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 15 May 2006 06:25:09 -0700
Subject: Shutdown tylansige SNF 2006-05-14 19:05:18: No Silane flow
Message-ID: <mailman.331.1356283829.5077.tylansige-pcs@snf.stanford.edu>

Silane back on



From maurice at snf.stanford.edu  Thu May 18 15:59:13 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 18 May 2006 15:59:13 -0700
Subject: Problem tylansige SNF 2006-02-10 10:38:58: SiH4 error
Message-ID: <mailman.332.1356283829.5077.tylansige-pcs@snf.stanford.edu>

logged



From tberg at snf.stanford.edu  Mon May 22 07:47:04 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 22 May 2006 07:47:04 -0700
Subject: Shutdown tylansige SNF 2006-05-22 07:47:03: shutdown for water and air tie ins
Message-ID: <mailman.333.1356283829.5077.tylansige-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Mon May 22 09:03:16 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 22 May 2006 09:03:16 -0700
Subject: Shutdown tylansige SNF 2006-05-22 07:47:03: shutdown for water and air tie ins
Message-ID: <mailman.334.1356283829.5077.tylansige-pcs@snf.stanford.edu>

tie in completed