Problem tylansige SNF 2006-02-10 10:38:58: SiH4 error
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu May 18 15:59:13 PDT 2006
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Shutdown tylansige SNF 2006-05-14 19:05:18: No Silane flow
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Shutdown tylansige SNF 2006-05-22 07:47:03: shutdown for water and air tie ins
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Shutdown tylansige SNF 2006-05-14 19:05:18: No Silane flow
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Shutdown tylansige SNF 2006-05-22 07:47:03: shutdown for water and air tie ins
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