From libei at snf.stanford.edu Sun Jul 8 17:01:43 2007 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Sun, 8 Jul 2007 17:01:43 -0700 Subject: Problem tylansige SNF 2007-07-08 17:01:42: MFS ALARM Message-ID: alarms due to SiH4 leak From mtang at snf.stanford.edu Tue Jul 10 09:13:48 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 10 Jul 2007 09:13:48 -0700 Subject: Problem tylansige SNF 2007-07-08 17:01:42: MFS ALARM Message-ID: See next problem message From mtang at snf.stanford.edu Tue Jul 10 09:15:18 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 10 Jul 2007 09:15:18 -0700 Subject: Problem tylansige SNF 2007-07-10 09:15:17: Intermittent MFS Alarm Message-ID: MFS Alarm for SiH4 sometimes. This does not affect your process, but make sure to report this to Staff and on Coral is you observe this. From libei at snf.stanford.edu Thu Jul 12 23:15:04 2007 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Thu, 12 Jul 2007 23:15:04 -0700 Subject: Problem tylansige SNF 2007-07-12 23:15:04: MFS alarms Message-ID: Always alarms, showing SiH4=0.1~0.3sccm when it is supposed to be 0 From latta at snf.stanford.edu Fri Jul 20 09:14:37 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Jul 2007 09:14:37 -0700 Subject: Problem tylansige SNF 2007-07-12 23:15:04: MFS alarms Message-ID: yep From latta at snf.stanford.edu Fri Jul 20 09:14:52 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Jul 2007 09:14:52 -0700 Subject: Problem tylansige SNF 2007-07-10 09:15:17: Intermittent MFS Alarm Message-ID: ok