From jhpark9 at snf.stanford.edu  Tue Jun  5 15:16:34 2007
From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu)
Date: Tue, 5 Jun 2007 15:16:34 -0700
Subject: Problem tylansige SNF 2007-06-05 15:16:33: SiH4 leak message
Message-ID: <mailman.358.1356283829.5077.tylansige-pcs@snf.stanford.edu>

While venting and boating in&out, there is MFS error due to SiH4 leak. I used CHION recipe.
Please check this leakage error.



From seymour at snf.stanford.edu  Tue Jun  5 15:51:58 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 5 Jun 2007 15:51:58 -0700
Subject: Comment tylansige SNF 2007-06-05 15:51:57: silane leak message
Message-ID: <mailman.359.1356283829.5077.tylansige-pcs@snf.stanford.edu>

When I went in to check the POCL3 tube problem, there was no Silane leak errors. 



From tberg at snf.stanford.edu  Thu Jun 14 08:03:38 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 14 Jun 2007 08:03:38 -0700
Subject: Comment tylansige SNF 2007-06-05 15:51:57: silane leak message
Message-ID: <mailman.360.1356283829.5077.tylansige-pcs@snf.stanford.edu>

noted



From tberg at snf.stanford.edu  Thu Jun 14 08:04:00 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 14 Jun 2007 08:04:00 -0700
Subject: Problem tylansige SNF 2007-06-05 15:16:33: SiH4 leak message
Message-ID: <mailman.361.1356283829.5077.tylansige-pcs@snf.stanford.edu>

No leak when went in to check