From jrjain at snf.stanford.edu Thu Oct 4 20:46:33 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 4 Oct 2007 20:46:33 -0700 Subject: Problem tylansige SNF 2007-10-04 20:46:33: H2 Problem Message-ID: During COAT8, Step 45. H2 setpoint 80, actual <1. From mdickey at snf.stanford.edu Fri Oct 5 08:35:08 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 5 Oct 2007 08:35:08 -0700 Subject: Comment tylansige SNF 2007-10-05 08:35:08: H2 flow Message-ID: Manually ran H2 at 80 with no problems From mdickey at snf.stanford.edu Fri Oct 5 13:20:10 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 5 Oct 2007 13:20:10 -0700 Subject: Shutdown tylansige SNF 2007-10-05 13:20:10: Temp problem Message-ID: Down for temp problem From jrjain at snf.stanford.edu Fri Oct 5 13:20:53 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 5 Oct 2007 13:20:53 -0700 Subject: Shutdown tylansige SNF 2007-10-05 13:20:51: Needs temp cal Message-ID: During a 500C stabilization, TEMPS stuck at 570-580 with TCU fixed at 70.48. Aborted and restarted recipe with maintenance, but problem still exists. From seymour at snf.stanford.edu Fri Oct 5 14:02:58 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 5 Oct 2007 14:02:58 -0700 Subject: Comment tylansige SNF 2007-10-05 14:02:58: starting temp calibration routine Message-ID: installed a recalibrated tcu board and started the backup t/c calibration. From tberg at snf.stanford.edu Fri Oct 12 09:27:11 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Oct 2007 09:27:11 -0700 Subject: Comment tylansige SNF 2007-10-12 09:27:09: 350 is done working on400 Message-ID: From tberg at snf.stanford.edu Mon Oct 15 13:06:49 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Oct 2007 13:06:49 -0700 Subject: Comment tylansige SNF 2007-10-15 13:06:49: working on 500 Message-ID: 400 and 450 completed over the weekend. working on 500 From maurice at snf.stanford.edu Tue Oct 16 15:35:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Oct 2007 15:35:29 -0700 Subject: Comment tylansige SNF 2007-10-16 15:35:29: Testing Message-ID: Once temp cal is complete Raja Jain will run process and monitor temps. From tberg at snf.stanford.edu Thu Oct 18 06:46:10 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:46:10 -0700 Subject: Comment tylansige SNF 2007-10-15 13:06:49: working on 500 Message-ID: Temp cal complete From tberg at snf.stanford.edu Thu Oct 18 06:46:23 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:46:23 -0700 Subject: Comment tylansige SNF 2007-10-12 09:27:09: 350 is done working on400 Message-ID: Noted From tberg at snf.stanford.edu Thu Oct 18 06:46:49 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:46:49 -0700 Subject: Shutdown tylansige SNF 2007-10-05 13:20:10: Temp problem Message-ID: Temp cal completed From tberg at snf.stanford.edu Thu Oct 18 06:47:16 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:47:16 -0700 Subject: Shutdown tylansige SNF 2007-10-05 13:20:51: Needs temp cal Message-ID: Temp cal completed From tberg at snf.stanford.edu Thu Oct 18 06:47:46 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:47:46 -0700 Subject: Problem tylansige SNF 2007-10-04 20:46:33: H2 Problem Message-ID: Resolved From tberg at snf.stanford.edu Thu Oct 18 06:48:11 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:48:11 -0700 Subject: Comment tylansige SNF 2007-10-16 15:35:29: Testing Message-ID: noted From tberg at snf.stanford.edu Thu Oct 18 06:48:44 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:48:44 -0700 Subject: Comment tylansige SNF 2007-10-05 14:02:58: starting temp calibration routine Message-ID: Temp cal completed300-550 From tberg at snf.stanford.edu Thu Oct 18 06:49:08 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Oct 2007 06:49:08 -0700 Subject: Comment tylansige SNF 2007-10-05 08:35:08: H2 flow Message-ID: noted From jrjain at snf.stanford.edu Fri Oct 19 22:28:32 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 19 Oct 2007 22:28:32 -0700 Subject: Problem tylansige SNF 2007-10-19 22:28:31: N2/Ar Flow Message-ID: During Ge deposition (Step 75) of CHION, N2/Ar setpoint is 0. However, flow was ~16-20 for first 5 minutes of deposition and fluctuated between 0 and ~5 throughout deposition.