Problem tylansige SNF 2007-10-19 22:28:31: N2/Ar Flow

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri Oct 19 22:28:32 PDT 2007


During Ge deposition (Step 75) of CHION, N2/Ar setpoint is 0.  However, flow was ~16-20 for first 5 minutes of deposition and fluctuated between 0 and ~5 throughout deposition.




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