Problem tylansige SNF 2007-10-19 22:28:31: N2/Ar Flow

[jrjain at snf.stanford.edu]

During Ge deposition (Step 75) of CHION, N2/Ar setpoint is 0.  However, flow was ~16-20 for first 5 minutes of deposition and fluctuated between 0 and ~5 throughout deposition.