From libei at snf.stanford.edu Thu Feb 7 12:16:53 2008 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Thu, 7 Feb 2008 12:16:53 -0800 Subject: Problem tylansige SNF 2008-02-07 12:16:53: Pressure Failure Message-ID: Recipe (CHION) runs fine at pump down and leak check step, but at step 55 (pressure stabilize) pressure increased to >1500 and it went to step 100 directly. From tberg at snf.stanford.edu Thu Feb 7 13:33:41 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Feb 2008 13:33:41 -0800 Subject: Problem tylansige SNF 2008-02-07 13:33:40: No GeH4 Message-ID: From libei at snf.stanford.edu Thu Feb 7 17:53:32 2008 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Thu, 7 Feb 2008 17:53:32 -0800 Subject: Shutdown tylansige SNF 2008-02-07 17:53:32: keeps alarming due to N2/Ar fault Message-ID: It always gives alarm at CHION step 55(pressure stablize). N2/Ar flow rate shows 613, which is three times higher than the setpoint 200 and the tube pressure is ~1700, which is also much higher than the setpoint 500, so the program jumped from step 55 to 100 directly without doing any deposition. From seymour at snf.stanford.edu Fri Feb 8 08:22:21 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Feb 2008 08:22:21 -0800 Subject: Shutdown tylansige SNF 2008-02-07 17:53:32: keeps alarming due to N2/Ar fault Message-ID: checked Monoblock millivolt reading for the N2/Ar flowmeter amd it was at zero, but the front panel reading was 322 sccm. I did an autozero and the flow now matches setpoint. From seymour at snf.stanford.edu Fri Feb 8 11:01:31 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Feb 2008 11:01:31 -0800 Subject: Problem tylansige SNF 2008-02-07 13:33:40: No GeH4 Message-ID: germane is back on the tool. From seymour at snf.stanford.edu Fri Feb 8 11:02:37 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Feb 2008 11:02:37 -0800 Subject: Problem tylansige SNF 2008-02-07 12:16:53: Pressure Failure Message-ID: N2 mfc flowing too much causing pressure controll problems. From seymour at snf.stanford.edu Fri Feb 8 11:03:17 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Feb 2008 11:03:17 -0800 Subject: Comment tylansige SNF 2008-01-07 15:15:59: on test of system i entered wromng step Message-ID: system has been up since this time. From seymour at snf.stanford.edu Fri Feb 8 11:05:24 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Feb 2008 11:05:24 -0800 Subject: Comment tylansige SNF 2008-02-08 11:05:17: pressure control issues. Message-ID: The MFS460 controller was locked up and needed to be reset. I will continue to monitor the tube for controll issues after I checked out and released at this time. From tberg at snf.stanford.edu Tue Feb 12 05:59:57 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 12 Feb 2008 05:59:57 -0800 Subject: Comment tylansige SNF 2008-02-08 11:05:17: pressure control issues. Message-ID: resolved From tberg at snf.stanford.edu Wed Feb 27 06:18:50 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Feb 2008 06:18:50 -0800 Subject: Comment tylansige SNF 2008-02-27 06:18:49: Temp Cal 500-650 Message-ID: Began temp cal 500 to 650 From seymour at snf.stanford.edu Thu Feb 28 13:31:35 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 Feb 2008 13:31:35 -0800 Subject: Comment tylansige SNF 2008-02-28 13:31:34: stopped backup T/C calibration Message-ID: The system calibrated at 550 and was working on 600 when I stopped it to allow user to run system. From seymour at snf.stanford.edu Fri Feb 29 15:28:37 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Feb 2008 15:28:37 -0800 Subject: Comment tylansige SNF 2008-02-29 15:28:34: backup T/C calibration Message-ID: the calibration completed to 600 degrees. unable to get the 650 calibration completed today. Will start again next week.