Problem tylansige SNF 2008-05-29 18:45:49: H2 MFC error
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Fri May 30 08:13:34 PDT 2008
H2 MFC zero had drifted. I reset the zeros and did an auto zero routine. H2 now flows at setpoint of 100 sccm. Prior to the zero adjust the H2 flowed 128 with a setpoint of 100.
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