From narii at snf.stanford.edu Wed Oct 1 15:06:01 2008 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Wed, 1 Oct 2008 15:06:01 -0700 Subject: Shutdown tylansige SNF 2008-10-01 15:06:01: MFS error / N2/AR does not shut off Message-ID: Cannot run any deposition because of MFS error. Seems like N2/AR does not shut off problem. From seymour at snf.stanford.edu Wed Oct 1 15:49:23 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Oct 2008 15:49:23 -0700 Subject: Shutdown tylansige SNF 2008-10-01 15:06:01: MFS error / N2/AR does not shut off Message-ID: found no MFS alarms, system is up From narii at snf.stanford.edu Sat Oct 4 18:44:24 2008 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 4 Oct 2008 18:44:24 -0700 Subject: Shutdown tylansige SNF 2008-10-04 18:44:22: Still error occurs Message-ID: C From narii at snf.stanford.edu Sat Oct 4 18:48:02 2008 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 4 Oct 2008 18:48:02 -0700 Subject: Shutdown tylansige SNF 2008-10-04 18:48:02: Still error occurs Message-ID: Unable to turn ON any gas other than N2/AR. Also unable to turn OFF N2/AR. Cannot run any deposition. The same problem as the last report. Please run at least COAT8 or any deposition recipe before confirm system to go up. From seymour at snf.stanford.edu Mon Oct 6 08:44:44 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Oct 2008 08:44:44 -0700 Subject: Shutdown tylansige SNF 2008-10-04 18:44:22: Still error occurs Message-ID: still errors occur, doesn't give any indication of what error, please be more specific when putting system down. From seymour at snf.stanford.edu Mon Oct 6 08:45:21 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Oct 2008 08:45:21 -0700 Subject: Problem tylansige SNF 2008-09-19 17:47:13: MFS:Error Message-ID: no errors after repair From seymour at snf.stanford.edu Mon Oct 6 08:47:49 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Oct 2008 08:47:49 -0700 Subject: Shutdown tylansige SNF 2008-10-04 18:48:02: Still error occurs Message-ID: found ch 4 N2 mfc to be above zero with no flow. Unable to adjust zero and it remain stable. replaced LM324 op amp and zero pot. adjusted zero and did auto zero routine. Putting system in pump recipe. From masaharu at snf.stanford.edu Tue Oct 7 03:00:33 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Tue, 7 Oct 2008 03:00:33 -0700 Subject: Shutdown tylansige SNF 2008-10-07 03:00:32: No gas flow during coat8 Message-ID: I think this is the same error as narii reported. I ran coat8 for test, however I saw MFS ERROR: 08 in step 55(deposition) and there were no gas flow. The inspection is needed. Thank you From masaharu at snf.stanford.edu Tue Oct 7 03:35:30 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Tue, 7 Oct 2008 03:35:30 -0700 Subject: Comment tylansige SNF 2008-10-07 03:35:30: MFS error8 occurs at step 50 Message-ID: I need to correct previous comments. MFS error8 atually occurs at step 50(stabilization). N2/Ar was flowing, however H2 was not. And process pressure was 166, off from the target 200. From tberg at snf.stanford.edu Tue Oct 7 13:56:28 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Oct 2008 13:56:28 -0700 Subject: Comment tylansige SNF 2008-10-07 13:56:27: Missing below Atmosphere signal Message-ID: Below atmosphere signal which allows process gases to flow is missing tring to figure it out From tberg at snf.stanford.edu Tue Oct 7 14:01:06 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Oct 2008 14:01:06 -0700 Subject: Comment tylansige SNF 2008-10-07 14:01:05: GeH4 cylinder changed in leak check Message-ID: From seymour at snf.stanford.edu Wed Oct 8 07:33:39 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 8 Oct 2008 07:33:39 -0700 Subject: Comment tylansige SNF 2008-10-08 07:33:38: GeH4 cylinder change completed Message-ID: the cylinder passes 24 hour leak check and I will turn the GeH4 to the tool. From tberg at snf.stanford.edu Wed Oct 8 08:20:08 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Oct 2008 08:20:08 -0700 Subject: Shutdown tylansige SNF 2008-10-07 03:00:32: No gas flow during coat8 Message-ID: repaired broken wire for below atm sensor. Ran coat 8 no problem From tberg at snf.stanford.edu Wed Oct 8 08:20:31 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Oct 2008 08:20:31 -0700 Subject: Comment tylansige SNF 2008-10-07 03:35:30: MFS error8 occurs at step 50 Message-ID: repaired broken wire for below atm sensor. Ran coat 8 no problem From tberg at snf.stanford.edu Wed Oct 8 08:20:40 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Oct 2008 08:20:40 -0700 Subject: Comment tylansige SNF 2008-10-07 13:56:27: Missing below Atmosphere signal Message-ID: repaired broken wire for below atm sensor. Ran coat 8 no problem From tberg at snf.stanford.edu Wed Oct 8 08:22:12 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Oct 2008 08:22:12 -0700 Subject: Comment tylansige SNF 2008-10-07 14:01:05: GeH4 cylinder changed in leak check Message-ID: Cylinder changed, leak checked and back on line From tberg at snf.stanford.edu Wed Oct 8 08:22:29 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Oct 2008 08:22:29 -0700 Subject: Comment tylansige SNF 2008-10-08 07:33:38: GeH4 cylinder change completed Message-ID: Cylinder changed, leak checked and back on line From masaharu at snf.stanford.edu Wed Oct 8 17:19:23 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 8 Oct 2008 17:19:23 -0700 Subject: Comment tylansige SNF 2008-10-08 17:19:22: System is fine Message-ID: I ran CHION. SiH4, H2, and GeH4 flow with no problem. Thank you for maintainance. From narii at snf.stanford.edu Tue Oct 21 16:27:04 2008 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 21 Oct 2008 16:27:04 -0700 Subject: Comment tylansige SNF 2008-10-21 16:27:03: Too much Ge deposited accidentally Message-ID: I found out that I confused deposition temperature (350 from 315..) and I guess too much germanium is deposited inside of the tube.