Shutdown tylansige SNF 2008-10-04 18:48:02: Still error occurs

narii at snf.stanford.edu narii at snf.stanford.edu
Sat Oct 4 18:48:02 PDT 2008


Unable to turn ON any gas other than N2/AR. Also unable to turn OFF N2/AR.
Cannot run any deposition. The same problem as the last report.
Please run at least COAT8 or any deposition recipe before confirm system to go up.




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