Shutdown tylansige SNF 2008-10-07 03:00:32: No gas flow during coat8

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Tue Oct 7 03:00:33 PDT 2008


I think this is the same error as narii reported.
I ran coat8 for test, however I saw MFS ERROR: 08
in step 55(deposition) and there were no gas flow.
The inspection is needed. Thank you




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