Comment tylansige SNF 2008-10-07 03:35:30: MFS error8 occurs at step 50

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Tue Oct 7 03:35:30 PDT 2008


I need to correct previous comments.
MFS error8 atually occurs at step 50(stabilization).
N2/Ar was flowing, however H2 was not.
And process pressure was 166, off from the target 200.




More information about the tylansige-pcs mailing list