From tberg at snf.stanford.edu Mon Aug 3 08:31:56 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Aug 2009 08:31:56 -0700 Subject: Comment tylansige SNF 2009-07-21 15:04:24: Leak Rate higher than usual Message-ID: From Ray's report leak check port required a little more torque to properly seal. Good base pressure leak rate about 8 mT/min From seymour at snf.stanford.edu Mon Aug 3 08:37:07 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 3 Aug 2009 08:37:07 -0700 Subject: Problem tylansige SNF 2009-07-31 18:14:17: Repump step PRCPR goes to 2000 Message-ID: I looked at the pumping and all looks normal. Perhaps the needle valve for the backflow was left turned up high and the initial flow when the nupro valve opened caused the pressure spike. From filip at snf.stanford.edu Thu Aug 13 21:05:35 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 13 Aug 2009 21:05:35 -0700 Subject: Shutdown tylansige SNF 2009-08-13 21:05:35: won't open Message-ID: after my recipe ran, the door wouldn't open. I waited an hour, and it still wouldn't open. There is N2/Ar leak alarm, which will not clear. Thus, the tube is below ATM, not venting, and will not open. Please save my wafers in the tube. Also, I already loaded coat8 program, but please don't run it until wafers are removed. From filip at snf.stanford.edu Thu Aug 13 21:19:53 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 13 Aug 2009 21:19:53 -0700 Subject: Comment tylansige SNF 2009-08-13 21:19:52: fixed Message-ID: ran first step of coat8 (pumpdown) which cleared the N2/Ar leak alarm, and then aborted the recipe. Vented fine. From filip at snf.stanford.edu Thu Aug 13 21:22:47 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 13 Aug 2009 21:22:47 -0700 Subject: Comment tylansige SNF 2009-08-13 21:22:47: nearly complete film Message-ID: after increasing the SiH4 flow from 100 to 200 sccm during seed growth, a nearly complete film formed. There is a small area at the edge (1cm2) that has not been edposited at all. From tberg at snf.stanford.edu Fri Aug 14 06:19:33 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 06:19:33 -0700 Subject: Problem tylansige SNF 2009-07-26 09:18:23: incomplete film Message-ID: after increasing the SiH4 flow from 100 to 200 sccm during seed growth, a nearly complete film formed. There is a small area at the edge (1cm2) that has not been edposited at all. From tberg at snf.stanford.edu Fri Aug 14 06:20:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 06:20:00 -0700 Subject: Shutdown tylansige SNF 2009-08-13 21:05:35: won't open Message-ID: ran first step of coat8 (pumpdown) which cleared the N2/Ar leak alarm, and then aborted the recipe. Vented fine. From tberg at snf.stanford.edu Fri Aug 14 06:20:11 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 06:20:11 -0700 Subject: Comment tylansige SNF 2009-08-13 21:19:52: fixed Message-ID: From tberg at snf.stanford.edu Fri Aug 14 06:20:39 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 06:20:39 -0700 Subject: Comment tylansige SNF 2009-08-13 21:22:47: nearly complete film Message-ID: noted From tberg at snf.stanford.edu Fri Aug 14 06:21:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 06:21:18 -0700 Subject: Comment tylansige SNF 2009-07-17 09:08:00: tube status Message-ID: noted From tberg at snf.stanford.edu Fri Aug 14 06:21:52 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 06:21:52 -0700 Subject: Comment tylansige SNF 2009-07-17 09:04:51: incomplete deposition Message-ID: Read later comments From tberg at snf.stanford.edu Fri Aug 14 06:22:05 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 06:22:05 -0700 Subject: Comment tylansige SNF 2009-07-19 21:49:30: Wafers look haze. Message-ID: noted From seymour at snf.stanford.edu Fri Aug 14 08:21:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Aug 2009 08:21:29 -0700 Subject: Shutdown tylansige SNF 2009-08-14 08:21:28: h2 interlock error Message-ID: From seymour at snf.stanford.edu Fri Aug 14 08:49:38 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Aug 2009 08:49:38 -0700 Subject: Shutdown tylansige SNF 2009-08-14 08:21:28: h2 interlock error Message-ID: H2 interlock cleared running coat8. From filip at snf.stanford.edu Thu Aug 20 13:03:29 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 20 Aug 2009 13:03:29 -0700 Subject: Problem tylansige SNF 2009-08-20 13:03:28: out of log sheets Message-ID: From tberg at snf.stanford.edu Mon Aug 24 06:10:49 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Aug 2009 06:10:49 -0700 Subject: Problem tylansige SNF 2009-08-20 13:03:28: out of log sheets Message-ID: not a problem but a comment